Process Hierarchy

  Clean
Process characteristics:
Etchant
Specify preferred cleaning agent/etchant (if known).
Etchant
Specify preferred cleaning agent/etchant (if known).
Process duration
Specify preferred cleaning time (if known).
Process duration
Specify preferred cleaning time (if known).
unconstrained
Sides processed
Specify whether cleaning is to occur on a single or both sides of substrate.
Sides processed
Specify whether cleaning is to occur on a single or both sides of substrate.
Temperature
Preferred cleaning temperature (if known).
Temperature
Preferred cleaning temperature (if known).
unconstrained
Equipment