Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
  Photoresist hardbake (Shipley 1813)
Ambient
Ambient to which substrate is exposed during processing
 air
Batch size 25
Excluded materials gold (category), copper
Loading effects
Free form text field for description of loading effects (e.g. bullseye)
 none
Material Shipley 1813
Pressure
Pressure of process chamber during processing
 1 atm
Sides processed both
Temperature 115 °C
Thermal duration 60 min
Wafer size
Wafer size
Equipment Blue M CC04-C-P-B
Equipment characteristics:
Wafer holder
Device that holds the wafers during processing.
 stainless steel
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
 silicon, silicon dioxide, alumina
Wafer thickness
List or range of wafer thicknesses the tool can accept
 300 .. 1000 µm
Extra terms
Customer agrees that wafers, masks, and other materials incorporating any process(es) provided by this fabrication site are to be used solely for non-commercial research purposes.