Hotplate |
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|---|---|
| Model | |
| Type | commercial |
| Comments | |
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| Equipment Characteristics | |
| Batch sizes | 100 mm: 6, 150 mm: 4, 200 mm: 1, 75 mm: 6 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
75 .. 200 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, no-flat, notched |
| Wafer holder Device that holds the wafers during processing. |
plate |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
alumina, gallium arsenide, glass (category), silicon |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 3000 µm |