Nanometrics NanoSpec 3000PHX |
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|---|---|
| Alternate Name | 3000PHX |
| Manufacturer | Nanometrics |
| Model | 3000PHX |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 50 .. 150 mm: 1 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
50 .. 150 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, no-flat, notched |
| Wafer holder Device that holds the wafers during processing. |
aluminum plate |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon |
| Attachments | |
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