Custom Cu plating bath |
|
|---|---|
| Model | |
| Type | custom |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 1, 50 mm: 1, 75 mm: 1 |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
50 mm, 75 mm, 100 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, no-flat, notched |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
alumina, Pyrex (Corning 7740), quartz (fused silica), quartz (single crystal), sapphire, silicon, silicon on insulator, silicon on sapphire |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 2000 µm |