Metron 3290 |
|
|---|---|
| Alternate Name | Varian 3290 |
| Manufacturer | Varian / Metron |
| Model | 3290 |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 1, 150 mm: 1, 75 mm: 1 |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
0 .. 75 mm |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
75 .. 150 mm |
| Wafer holder Device that holds the wafers during processing. |
aluminum chuck |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
quartz (fused silica), silicon, silicon on insulator |