Evatek -Batch dome |
|
|---|---|
| Model | BAK641 |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 24, 150 mm: 9, 50 mm: 78, 75 mm: 33 |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
50 .. 150 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
alumina, ceramic, silicon, Pyrex (Corning 7740), fused silica, silicon on insulator, Borofloat (Schott) |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 800 µm |