Heidelberg VPG200++ |
|
|---|---|
| Model | VPG 200+ |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 1, 150 mm: 1, 200 mm: 1 |
| File formats List of CAD file formats supported (eg. GDSII, CIF) |
cif |
| Mask plate dimensions Width, length, thickness of the mask plates (eg. 5x7x0.09 inch). |
200mm x 200mm |
| Max field size | 200 mm |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm, 150 mm, 200 mm |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 2000 µm |